Electron Effective Attenuation Lengths for Materials at 50-2000 eV

NIST's Electron Effective-Attenuation-Length Database provides calculated values for electron effective attenuation lengths (EALs) in materials. It was designed primarily for thickness measurements of overlayer films and depth measurements of thin marker layers. The database is based on electron transport theory and allows user selection of electron energies between 50 eV and 2,000 eV.

Use Cases

• Calculate EAL values for specific materials at user-selected electron energies between 50 eV and 2,000 eV to support overlayer film thickness measurements.
• Apply the database's EALs, based on electron transport theory, to correct for elastic-electron scattering effects in surface analysis techniques like XPS and Auger Electron Spectroscopy.
• Use the provided EAL data for measurements of thin marker layer depths, as specified in the database's design purpose.

Strengths

• Data is provided by the National Institute of Standards and Technology (NIST), a recognized authority on measurement standards.
• Covers a defined and relevant electron energy range from 50 eV to 2,000 eV for surface analysis applications.
• Calculation methodology is based on peer-reviewed electron transport theory, with supporting publications cited.

Limitations

• The dataset is provided in HTML format, which is not a standard structured data format (e.g., CSV, JSON) for direct programmatic analysis.
• Specific data volume metrics like row count, column count, and file size are unknown, making it difficult to assess scale.
• The license is listed as 'other-license-specified', requiring users to investigate specific terms before use.

Provenance

Source

National Institute of Standards and Technology (NIST)

Collection Method

Values are calculated using an algorithm based on electron transport theory for user-specified conditions.

Freshness

Last updated on March 12, 2024.