Optical Scattering Measurements and Simulations for 1D Periodic Nanostructures

Over two thousand electromagnetic simulations model optical scattering from periodic line arrays with a 300 nm pitch. The dataset also includes angle-resolved optical measurements with uncertainties for nine physical arrays that differ in dimensions. Data is formatted for use with the Model-Based Optical Metrology in R (MoR) software.

Use Cases

• Train machine learning models to solve the inverse problem of predicting linewidth parameters (top, middle, bottom) from angle-resolved scattering data.
• Validate electromagnetic simulation results against experimental measurements from the nine lithographically varied arrays.
• Analyze the sensitivity of scattered optical intensity to variations in linewidth parameters across the two provided simulation subsets with different sampling strategies.
• Benchmark regression algorithms for determining average feature sizes based on optical scattering from the L100P300 nanostructures.

Strengths

• Contains over two thousand indexed electromagnetic simulations parameterized by top, middle, and bottom linewidths.
• Includes experimental angle-resolved optical measurements with quantified uncertainties for nine distinct physical arrays.
• Data is specifically formatted for direct use with the dedicated MoR (Model-Based Optical Metrology in R) software package.

Limitations

• The experimental data is limited to nine specific arrays, which may not represent the full range of possible manufacturing variations.
• The dataset focuses exclusively on one-dimensional periodic features (line gratings) with a specific nominal geometry (100 nm linewidth, 300 nm pitch).
• Certain commercial materials are identified, which may require licensing considerations for commercial replication of the experiments.

Provenance

Source

National Institute of Standards and Technology (NIST).

Collection Method

Combines electromagnetic simulations based on an average geometric model with physical angle-resolved optical scattering measurements.

Freshness

Last updated in July 2022.