Experimental Settings for Semiconductor Wafer Defect Detection

A 5.5 KB Excel file containing experimental settings for a hybrid defect detection system. The dataset was uploaded by Sharith Dhar to figshare and last updated on April 8, 2026. It relates to the WM-811K semiconductor wafer dataset and a proposed system using a modified MobileNet with an ECOC-SVM classifier.

Use Cases

• Benchmarking defect detection models based on the described hybrid MobileNet-ECOC-SVM system.
• Reproducing the ablation study mentioned in the description to validate architectural modifications.
• Analyzing performance metrics like accuracy, AUC, recall, and precision for wafer inspection systems.

Strengths

• File size is precisely 5.5 KB, indicating a small, focused metadata or configuration dataset.
• License is clearly defined as CC-BY-4.0, permitting broad reuse with attribution.
• Last update timestamp is provided (2026-04-08 17:35:38).

Limitations

• Row count is unknown, which may limit suitability assessment.
• Column-level documentation is absent; field semantics must be inferred after download.
• Description metadata is limited; actual data quality requires manual inspection after download.

Provenance

Source

figshare, uploaded by Sharith Dhar.

Collection Method

Likely contains parameters or results from the described experimental study.

Time Range

null

Freshness

Last updated 2026-04-08 17:35:38; freshness should be verified.

Geography

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