Photon Activation Analysis: Literature Review on Thin Film Analytical Techniques

A literature review evaluating analytical techniques for thin films containing light elements. Over 1000 abstracts were screened and more than 150 citations were critically reviewed to assess instruments, procedures, and results for model systems like SiOXNY and AlOXNY. The work was authored by Sabine Dreer of TU Wien and combines the reviewed literature with the authors' own investigative results.

Use Cases

• Comparing analytical method performance based on the reviewed literature on instruments and procedures
• Identifying limitations and pitfalls of different analysis techniques for light-element thin films
• Formulating recommendations for method combinations based on the analysis of multicomponent systems
• Reviewing the state of the art for film types, deposition methods, and investigation goals mentioned in the description

Strengths

• Based on a review of over 1000 screened abstracts
• Critically evaluates more than 150 citations
• Combines literature review with authors' own investigative results
• Provides recommendations for optimized analytical method combinations

Limitations

• Row count is unknown, which may limit suitability assessment
• Column-level documentation is absent; field semantics must be inferred after download
• Last update date is unknown; freshness unverified

Provenance

Source

Sabine Dreer, TU Wien

Collection Method

Literature review and synthesis