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High quality epitaxial niobium nitride thin films were grown on MgO substrates by pulsed laser deposition while varying nitrogen partial pressure. The dataset, 200.5 MB in size, was authored by Zeyou Li and last updated on April 21, 2026. It is shared under a CC-BY-4.0 license on the figshare platform.
Data is provided in TXT format; specific structure and required tools for analysis are not described.