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Ellipsometric data for gold-silver alloys fabricated via a low-temperature annealing technique, along with measurements and calculations of single-structure alloyed Fano-resonance nanostructures. The data accompanies the manuscript "Low temperature annealing method for fabricating alloy nanostructures and metasurfaces: Unlocking a novel degree of freedom" (arXiv:2105.02461) by Debdatta Ray of École Polytechnique Fédérale de Lausanne. The dataset includes permittivity values from the Rioux model and corresponding structural calculations.
License is listed as Open Access (green); specific terms should be verified within the data files.